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Linear profiles monitoring in the presence of nonnormal random errors

机译:在存在非正常随机误差的情况下进行线性轮廓监视

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Profile monitoring is a technique to test the stability of the relationship between a response variable and explanatory variables over time. The most relevant linear profile monitoring methods have been constructed using the normality assumption. However, the normality assumption could be violated in many quality control applications. In this study, we consider a situation in which the random errors in a linear profile model follow a skew-normal distribution. The skew-normal distribution is a generalized version of the normal distribution. A new Shewhart-type chart and exponentially weighted moving average (EWMA) chart, named the Shewhart (R) and EWMA (R) charts, respectively, are constructed based on residuals to monitor the parameters of linear profile model. The simulation results show that the multivariate EWMA chart is sensitive to the normality assumption and that the proposed Shewhart (R) and EWMA (R) charts have good ability to detect big and small-to-moderate process shifts, respectively. An example using photo mask techniques in semiconductor manufacturing is provided to illustrate the applications of the Shewhart (R) and EWMA (R) charts.
机译:概要监视是一种测试响应变量和解释变量之间的关系随时间推移的稳定性的技术。使用正态性假设构造了最相关的线性轮廓监视方法。但是,在许多质量控制应用程序中可能会违反正常性假设。在这项研究中,我们考虑一种情况,其中线性轮廓模型中的随机误差遵循偏正态分布。偏态正态分布是正态分布的广义版本。基于残差构造了新的Shewhart型图和指数加权移动平均(EWMA)图,分别称为Shewhart(R)和EWMA(R)图,以监视线性轮廓模型的参数。仿真结果表明,多元EWMA图对正态性假设敏感,建议的Shewhart(R)和EWMA(R)图分别具有检测大到中到小过程偏移的良好能力。提供了在半导体制造中使用光掩模技术的示例,以说明Shewhart(R)和EWMA(R)图的应用。

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