Design compensation for fabrication imperfections of tuning-fork gyroscopes

摘要

Microelectromechanical systems (MEMS) gyroscopes consist of proof masses that are driven to vibration. The sensing of angular motion requires certain symmetry in the driven motion. This symmetry is destroyed by imperfections introduced during the device fabrication. Strategies at the design stage that can compensate for the effect of fabrication imperfections are proposed. Our analyses are conducted through a discrete coupled oscillator model. The results are further verified through a finite element model of a tuning-fork microgyroscope design.