Passive wireless pressure sensor fabricated in low-temperature co-fired ceramic technology

摘要

A passive wireless pressure sensor based on low-temperature co-fired ceramic was investigated. The sensor is equivalent to a LC resonant circuit, which has a planar spiral inductor and an interdigital capacitor electrically connected. The inductor and capacitor are fabricated by screen printing technology. The working principle of the sensor is based on the pressure-sensitive resonant frequency of the LC circuit. Wireless detection can be realized by electromagnetic coupling with two inductor coils. The results show that the resonant frequency of sensor decreases with the increase in pressure, and sensitivity of the sensor is about 412.32 kHz/bar.