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Laser Direct Imaging

机译:激光直接成像

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摘要

Laser direct imaging (LDI) technology has developed to the point where there is little doubt that it can be successfully implemented in large-scale production. Enabled by high speed and specially optimized dry film photoresist compositions, more than 120 systems are now in operation globally, giving some significant benefits to its users. Solid state laser technology has also made operation less costly than for the early gas laser systems.
机译:激光直接成像(LDI)技术已经发展到可以毫无疑问地在大规模生产中成功实施的地步。借助高速且经过特别优化的干膜光致抗蚀剂组合物,全球有超过120个系统正在运行,这为其用户带来了一些显着的好处。与早期的气体激光系统相比,固态激光技术还降低了运行成本。

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