研摩レス超平滑研削法の開発（第3報）:研削方向直角送リ量の影響

摘要

The ultra-smoothness grinding method based on the new concept, which can finish to almost the same smoothness formed by polishing method, in the first research, is developed as the countermeasure answering the recently strong requirement about high efficiency production of high quality components. In the 2nd report, the surface roughness of various kinds of workpieces formed with the #140 diamond wheel by means of the method is ascertained to attain below 50nm(Rz). Furthermore the influence of wheel speed on the surface roughness is investigated. In the report following the 2nd report, the influence of normal feed to grinding direction on the surface roughness is investigated. Below the critical normal feed, the surface roughness becomes below about 60nm (Rz) in three dimensional measurement of 256μm square. Over the critical normal feed, the surface roughness begins to deteriorate steeply to a certain value. Beyond the value, the surface roughness tends to increase gradually with the increase of normal feed.%近年，機器の高品位化に伴う部品の高精度化や高平滑化等のrn要求に加え，低価格化が強く求められている，このため，加工rn能率が低く，加工精度向上も難しい，研摩加工に替え得る高平rn滑研削法の開発に強い要望がある。このようなことから，筆者rn等の一人は，図1に示すような，新概念に基づく超平滑研削法rnを開発した．