In recent years inkjet technology has a wide range of application including Flat Panel Display and Semiconductors. As compared with consumer appliances, industrial inkjet requires higher specifications in terms of dot placement accuracy and droplet volume uniformity. The stability of inkjet is a major requirement and then an in-situ monitoring system for inkjet condition is strongly required to prevent inferior products. In piezo-driven inkjet heads, the piezo actuators can be used as sensors to detect jetting failures caused by air bubbles. This might be the key technology to improve the reliability of the inkjet process. In this paper, we propose the model of jetting failure detection system and point out how the modification of the inkjet driving circuit for better jetting performance influences on the detection results. The prototype of the jetting failure detection system is developed and used to validate the detection algorithm both in time and frequency domain. This prototype and detection algorithm can realize the in-situ monitoring for all jetting due to high-speed system configuration.%近年,インクジェット技術の進歩は目覚しく,プリンタの範rn疇を超えて,Flat Panel Display(以下,FPDと記す)や電子rnデバイス等の産業分野へと,その応用範囲を広げている.しrnかし,量産に適用された事例は,液晶の配向膜やカラーフィルrnタの製造と,未だに少ないのが現状である.産業用途への適応rnが進まない根本原因の一つは,気泡や微小ダストがヘッド内部rnに入り込む事によってしばしば吐出異常が起き,量産レベルのrn吐出安定性を実現するのが難しいためである.
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