Sheath characteristics in multi-component plasma with negative ions

摘要

Properties of steady state ion sheath formed in front of a negatively biased metal plate under the influence of negative ions have been investigated in collisionless argon/SF₆ plasma. This experiment is carried out at a fixed discharge voltage and fixed filament heating power. In this experiment, the decrement in plasma pre-sheath potential drop as well as positive ion drift velocity toward the plate is experimentally recorded in the presence of negative ions. It is also found that the plasma positive ion density and plasma electron temperature decrease in the presence of negative ions. These factors attribute to the decrease of ion current toward the plate. Hence the usual ion sheath expands.