Study of Preionization XeCl Excimer Laser and Ultraviolet Spectrum Characteristic

摘要

The pumped system of the XeCl excimer laser has been designed and applied to analyze UV XeCl laser spectroscopy characteristics. Under the proportion of mixed gas of HCl: Xe: He = 0.1% : 1% : 98.9%, excimer laser light was generated by stable glow discharge process. The laser spectrum, pulse duration, and laser power properties were obtained. The result shows that this XeCl excimer laser exhibits unique spectral properties, with two peaks between 307.7 nm and 308.5 nm at high pressure with a pumped power of 1.3959 MW/cm~3. The transition relies on the strongest transitions between B-X and C-X. The maximum-intensity transition of spectroscopy is B to X energy levels. The laser parameters are as follows: minimal duration of 15.42 ns, a repetition rate from 0.5 Hz to 5 Hz, single pulse stable power of 400 mJ, and beam divergence angle of 3 mrad. The laser can be used to study UV spectroscopy, laser ablation sampling and sputtered pinnate form.