Deposition of SiO_x on Metal Surface with a DBD Plasma Gun at Atmospheric Pressure for Corrosion Prevention

摘要

In this study, SiO_x films were deposited by a dielectric barrier discharge (DBD) rnplasma gun at an atmospheric pressure. The relationship of the film structures with plasma powers was investigated by Fourier transform infrared spectroscopy (FTIR), and scanning electron microscope (SEM). It was shown that an uniform and cross-linking structure film was formed by the DBD gun. As an application, the SiO_x films were deposited on a carbon steel surface for the anti-corrosion purpose. The experiment was carried out in a 0.1 M NaCl solution. It was found that a very good anti-corrosive property was obtained, i.e., the corrosion rate was decreased c.a. 15 times in 5% NaCl solution compared to the non-SiO_x coated steel, as detected by the potentiodynamic polarization measurement.