Explosion model applied to an intense pulsed plasma source for thin film deposition

摘要

A pulsed plasma source for deposition of thin polymer films was modeled numerically with the one-dimensional (1-D) time dependent fluid transport equations describing an explosion for an ideal gas. Initial number density, explosion temperature, and velocity were made consistent with values in an experimental reactor. These quantities as well as pressure and fluence were modeled for a distance of 2 m and for a time duration of 93 /spl mu/s. The trajectory for maximum pressure calculated from the model was observed to be consistent with the experimentally measured trajectory of maximum emitted light from an acetylene plasma. Measured axial profiles of areal density for the deposited polymer films were compared with modeled fluence.