Gas Cluster Ion Beam Equipment and Applications for Surface Processing

Toyoda N.; Yamada I.

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Gas Cluster Ion Beam Equipment and Applications for Surface Processing

机译：气体团簇离子束设备及其在表面处理中的应用

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A gas cluster is an aggregate of a few to several thousands of gaseous atoms or molecules, and it can be accelerated to the desired energy after ionization. Since the kinetic energy of an atom in a cluster is equal to the total energy divided by th

机译：气体团簇是由几到数千个气态原子或分子组成的聚集体，在电离后可以加速到所需的能量。由于簇中原子的动能等于总能除以th

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来源
《IEEE Transactions on Plasma Science》 |2008年第4期|p.1471-1488|共18页
作者
Toyoda N.; Yamada I.;
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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类等离子体物理学;
关键词
Ion beam applications; ion beams; ion sources; surface treatment;

机译：离子束应用;离子束;离子源;表面处理;

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专利

1. Gas cluster ion beam applications and equipment [J] . Allen Kirkpatrick Nuclear Instruments & Methods in Physics Research. B, Beam Interactions with Materials and Atoms . 2003,第May期

机译：气体团簇离子束应用及设备
2. Surface modification with gas cluster ion beams from fundamental characteristics to applications [J] . N. Toyoda, J. Matsuo, I. Yamada Nuclear Instruments & Methods in Physics Research. B, Beam Interactions with Materials and Atoms . 2004,第Feb期

机译：气体团簇离子束从基本特性到应用的表面改性
3. Gas cluster ion beam processing of gallium antimonide wafers for surface and sub-surface damage reduction [J] . Li X., Goodhue WD., Santeufeimio C., Applied Surface Science . 2003,第1a4期

机译：锑化镓晶片的气体团簇离子束处理，可减少表面和亚表面损伤
4. Equipment for processing by gas cluster ion beams [C] . Allen Kirkpatrick, Mames Greer, American Institute of Physics International conference on application of accelerators in research and industry . 1999

机译：气体聚类离子束处理设备
5. Fundamental studies of the interaction between energetic C 60 Cluster ion beams with inorganic and organic solid surfaces. [D] . Brenes, Daniel Alejandro. 2012

机译：高能C 60团簇离子束与无机和有机固体表面之间相互作用的基础研究。
6. Out-of-plane surface patterning by subsurface processing of polymer substrates with focused ion beams [O] . Serguei Chiriaev, Luciana Tavares, Vadzim Adashkevich, 2020

机译：通过聚合物基板的地下处理具有聚焦离子束的外平面图案化
7. Nano-Scale Surface Processing by Gas Cluster Ion beams. [O] . Isao Yamada 1996

机译：纳米级表面处理气体聚类离子束。
8. Molecular Beam Epitaxy on Gas Cluster Ion Beam Prepared GaSb Substrates: Towards Improved Surfaces and Interfaces; Journal article [R] . Krishnaswami, K., Vangala, S. R., Dauplaise, H. M., 2007

机译：气体团簇离子束制备的Gasb衬底上的分子束外延：朝向改进的表面和界面;杂志文章

Gas Cluster Ion Beam Equipment and Applications for Surface Processing

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