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首页> 外文期刊>Plasma Science, IEEE Transactions on >Excitation Patterns and Heating Mechanisms During E-H-Mode Transition in Inductively Coupled RF Oxygen Discharges
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Excitation Patterns and Heating Mechanisms During E-H-Mode Transition in Inductively Coupled RF Oxygen Discharges

机译:电感耦合RF氧放电E-H-模式转变过程中的激发模式和加热机理

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摘要

Optical excitation patterns and electron heating mechanisms were investigated in inductively coupled radio frequency oxygen discharges by phase and space resolved optical emission spectroscopy. Four excitation patterns due to different electron heating mechanisms were found during the E-H-mode transition.
机译:通过相位和空间分辨光发射光谱研究了电感耦合射频氧放电中的光激发模式和电子加热机理。在E-H模式转换过程中,由于不同的电子加热机制,发现了四个激发模式。

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