Properties of Pulsed Magnetron Sputtered TiO2 Coatings Grown under Different Magnetron Configurations and Power Deliver Modes

Yin Nan Kok; Peter J. Kelly

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Properties of Pulsed Magnetron Sputtered TiO2 Coatings Grown under Different Magnetron Configurations and Power Deliver Modes

机译：在不同磁控管配置和功率传输模式下生长的脉冲磁控溅射TiO2涂层的性能

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来源
《Plasma processes and polymers》 |2007年第1期|299-304|共6页
作者
Yin Nan Kok; Peter J. Kelly;
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作者单位

Surface Engineering Group Dalton Research Institute John Dalton Building Manchester Metropolitan University Chester Street Manchester M1 5GD UK;

Surface Engineering Group Dalton Research Institute John Dalton Building Manchester Metropolitan University Chester Street Manchester M1 5GD UK;

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原文格式 PDF
正文语种 eng
中图分类
关键词
pulsed magnetron sputtering; large area coatings; titania; properties; structure; FFE;

机译：脉冲磁控溅射;大面积涂层;二氧化钛;性能;结构;FFE;

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2. Optical properties of diamond like carbon films containing copper, grown by high power pulsed magnetron sputtering and direct current magnetron sputtering: Structure and composition effects [J] . Meskinis S., Ciegis A., Vasiliauskas A., Thin Solid Films . 2015,第apra30期

机译：通过大功率脉冲磁控溅射和直流磁控溅射生长的含铜的类金刚石碳膜的光学性质：结构和组成效应
3. Mechanical and tribological properties of CrN/TiN superlattice coatings deposited by a combination of arc-free deep oscillation magnetron sputtering with pulsed dc magnetron sputtering [J] . Ou Y. X., Lin J., Che H. L., Thin Solid Films . 2015,第NOVa2PTaA期

机译：无弧深振荡磁控溅射与脉冲直流磁控溅射相结合沉积的CrN / TiN超晶格涂层的力学和摩擦学性能
4. Industrial-Scale Production of Corrosion-Resistant CrN/NbN Coatings Deposited by the Combined High Power Impulse Magnetron Sputtering Etching Unbalanced Magnetron Sputtering Deposition (HIPIMS/UBM) Process [C] . A.P. Ehiasarian, C. Reinhard, P.Eh. Hovsepian, 49th Annual Technical Conference Proceedings . 2006

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5. Tribological and structural properties of titanium nitride and titanium aluminum nitride coatings deposited with modulated pulsed power magnetron sputtering [D] . Ward, Logan 2014

机译：调制脉冲功率磁控溅射沉积氮化钛和氮化铝钛涂层的摩擦学和结构性能
6. Effect of SiNx diffusion barrier thickness on the structural properties and photocatalytic activity of TiO2 films obtained by sol–gel dip coating and reactive magnetron sputtering [O] . Mohamed Nawfal Ghazzal, Eric Aubry, Nouari Chaoui, 2015

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机译：高功率脉冲磁控溅射和不平衡磁控溅射技术相结合产生的多层氮化铬/氮化铌涂层的缺陷生长

Properties of Pulsed Magnetron Sputtered TiO2 Coatings Grown under Different Magnetron Configurations and Power Deliver Modes

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