Revival of Smooth MgO(100) Surface: Ar Ion-Beam Milling and Postvacuum Annealing in Oxygen Atmosphere

摘要

A recreation procedure for achieving the smooth and clean surface morphology ofthe degraded MgO(100) substrates is presented. The surfaces of the degradedMgO(100) substrates are treated with Ar ion-beammilling (IBM) and annealing inO_2 atmosphere. After each treatment, the changes in the MgO(100) substratesurface morphology are characterized using X-ray diffraction (XRD), a 3D opticalprofilometer, atomic force microscopy, and Fourier-transform infrared (FTIR)spectroscopy and compared with a fresh MgO substrate. It is shown that beforeany treatment, XRD and FTIR spectra show peaks corresponding to hydroxyl andcarbonate groups in the degraded samples, whereas after treatment, XRD andFTIR spectra are comparable with the fresh sample. Further, after treatment, thesurface roughness R_(av) value for two used/degraded samples reduces from 129and 186 nm to 3.96 and 7.91 nm, respectively, after combined Ar IBM andannealing treatment. It is shown that the surface quality of the treated MgO(100)substrate improves in comparison with as it was before any treatment and can bereused for the good quality thin-film deposition.