...
首页> 外文期刊>Physica status solidi >Properties of diamond-like carbon nano-coating deposited with RF PECVD method on UV-induced long-period fibre gratings
【24h】

Properties of diamond-like carbon nano-coating deposited with RF PECVD method on UV-induced long-period fibre gratings

机译:RF PECVD法在紫外诱导的长周期光纤光栅上沉积类金刚石碳纳米涂层的性能

获取原文
获取原文并翻译 | 示例
           

摘要

The paper discusses the properties of diamond-like carbon (DLC) thin overlays deposited with radio frequency plasma-enhanced chemical vapour deposition (RF PECVD) method on optical fibres with long-period fibre gratings (LPFGs) induced by UV irradiation. In consequence of low deposition temperature, the UV-induced LPFGs can be coated with DLC without damaging the thermally-instable grating structure. We have found that properties of the DLC overlays highly depend on a distance between the LPFG and electrode in the deposition chamber. Moreover, the response of the LPFG to variation in external refractive index (RI) can be tuned by deposition of DLC nano-overlay. For the investigated DLC-coated LPFGs we obtained sensitivity reaching over 3000 nm per RI unit in the range of n_D= 1.33 to 1.37 RIU, which is almost 12 fold higher than for the LPFGs with no overlay in the same RI range.
机译:本文讨论了用射频等离子体增强化学气相沉积(RF PECVD)方法在具有长周期光纤光栅(LPFG)的光纤上通过紫外线辐照沉积的类金刚石碳(DLC)薄覆盖层的性能。由于沉积温度低,可以在不损坏热不稳定光栅结构的情况下用DLC涂覆紫外线诱导的LPFG。我们已经发现,DLC覆盖层的性质高度取决于LPFG和沉积室中电极之间的距离。此外,可以通过沉积DLC纳米叠加层来调整LPFG对外部折射率(RI)变化的响应。对于研究的DLC涂层LPFG,我们获得的灵敏度在n_D = 1.33至1.37 RIU范围内达到每个RI单元超过3000 nm,这比在相同RI范围内没有覆盖的LPFG几乎高出12倍。

著录项

  • 来源
    《Physica status solidi》 |2014年第10期|2307-2312|共6页
  • 作者单位

    Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, Warsaw 00-662, Poland;

    Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, Warsaw 00-662, Poland;

    Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, Warsaw 00-662, Poland;

    Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, Warsaw 00-662, Poland;

    Institute of Materials Science and Engineering, Lodz University of Technology, Stefanowskiego 1/15, Lodz 90-924, Poland;

    Institute of Physics, Polish Academy of Sciences, Al. Lotnikow 32/46, Warsaw 02-666, Poland;

    Centre de Recherche en Photonique, Universite du Quebec en Outaouais, 101 rue Saint-Jean-Bosco, Gatineau, QC J8X3X7, Canada;

    Centre de Recherche en Photonique, Universite du Quebec en Outaouais, 101 rue Saint-Jean-Bosco, Gatineau, QC J8X3X7, Canada;

  • 收录信息
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    diamond-like carbon; long-period gratings; optical fibre devices; optical fibre sensors; plasma enhanced CVD;

    机译:类金刚石碳;长周期光栅;光纤设备;光纤传感器;等离子体增强CVD;

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号