Simulations, fabrication, and characterization of diamond-coated Love wave-type surface acoustic wave sensors

摘要

Diamond is an attractive material for biosensing applications due its chemical stability and biocompatibility and the recent development of various covalent attachment schemes for biomolecules. Acoustic sensors are highly sensitive with the capability to detect minute mass variation by monitoring changes in their electro-mechanical resonance frequency. Quartz crystal microbalance (QCM) sensors are the simplest that can operate in liquids but in comparison, Love wave sensors are more sensitive acoustic detectors in comparison. In this work, we present both theoretical and experimental study of Love wave-type surface acoustic wave (SAW) devices on AT quartz crystals substrates coated with diamond at low temperature for biosensing applications.