Aberration-free lithography setup for fabrication of holographic diffractive optical elements

摘要

A holographic optical lithography setup with extremely small longitudinal spherical aberration is described.nThe setup is used for the fabrication of holographic diffractive optical elements intended to collect light emit-nted from a fluorescence spot located on a biochip surface. A key feature of the optical setup is its ability tonsimulate a point-source-like fluorescence spot. A detailed description of the setup together with its opticalnproperties are provided. The fluorescence light collection efficiency of the holographic diffractive optical el-nements produced using this setup is demonstrated. © 2009 Optical Society of America