MEMS light infinite-target micro-generator for camera point-spread function measurements

摘要

An optical infinite-target generator is a key component utilized in the point-spread function (PSF) measurement of an optical camera. The traditional optical infinite-target generator uses a collimator that adopts an optical focal plane of single-aperture light lead-in. The measurement accuracy is relatively low and only a viewpoint PSF is obtained at a measurement. Moreover, the traditional optical infinite-target generator is difficult to be integrated into cameras. Here, we propose and experimentally demonstrate a MEMS light infinite-target micro-generator (MEMS-LITMG) with an updateable multi-aperture light lead-in, which can be used as the light infinite multiple-target generator for measuring PSF of cameras. The MEMS-LITITG, a dynamically updateable multi-aperture light lead-in device, can measure different viewpoints' PSF by spatially modulating multi-aperture light lead-in. The random error of this measurement system is decreased by the optimized reconstruction with multiple apertures structure. Based on this new construction and implementation method in the design of the new infinite-target generator system, the reliability for high-accuracy PSF measurement of an optical camera is guaranteed.