Surface detection and 3D profilometry for microstructure using optical metrology

摘要

A surface detection or 3D profilometry for microstructure(millimeter size)based on the project grating method and phase measurement techniques is presented in this paper. The advantages of this technique are simple measuring apparatus, full field and almost real-time testing. The principle and theoretical analysis of the measuring sensitivity are described and four application examples including a calibration example are also presented in this paper.