Moire fringes as two-dimensional autocorrelation of transmission function of linear gratings and its application for modulation transfer function measurement

摘要

In this work, we show that the transmission moire pattern is two-dimensional autocorrelation of transmission function (2D-ACTF) of two superimposed linear gratings that make a small angle with each other. In this approach, the properties of moire fringes vs. the relative displacement of the gratings are formulated. By measuring 2D-ACTF of two similar gratings, we evaluate the modulation transfer function (MTF) of the gratings' generating system. This work is the generalized form of our previous works. The implied MTF measurement method is easier and faster than our previous methods.