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Far-field modeling of Moire interferometry using scalar diffraction theory

机译:基于标量衍射理论的莫尔干涉仪远场建模

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摘要

A far-field model of Moire Interferometer (MI) using the mode decomposition method is proposed using the analytical formulation of the scalar diffraction theory. The wave propagation within the defined MI far-field domain is solved analytically for a single frequency surface relieved grating structure, following the Rayleigh-Sommerfeld formulation under the paraxial approximation. It is shown that the electrical field solution of the single frequency grating structure follows the linear relationship in the spatial frequency domain. Furthermore, we show that the far-field electrical field and the intensity interferogram can be calculated using the mode deposition method. A series of MI interferograms is obtained from the Finite Element Analysis (FEA) deformation field using chirp-z transform and inverse chirp-z transform. By performing strain extraction using Continuous Wavelet Transform (CWT), the simulated interferograms are validated and matched against the FEA deformation field. It is concluded that the proposed far-field modeling of MI is accurate and computationally efficient. The proposed method can help design high resolution and high sensitivity MI and interpret complex MI interferogram patterns.
机译:利用标量衍射理论的解析公式,提出了一种采用模态分解法的莫尔干涉仪(MI)远场模型。按照近轴近似下的Rayleigh-Sommerfeld公式,对于单频表面起伏光栅结构,通过解析法解决了定义的MI远场域内的波传播问题。结果表明,单频光栅结构的电场解在空间频域内遵循线性关系。此外,我们表明可以使用模式沉积方法来计算远场电场和强度干涉图。使用chirp-z变换和反chirp-z变换从有限元分析(FEA)变形场获得一系列MI干涉图。通过使用连续小波变换(CWT)进行应变提取,可以验证仿真干涉图并将其与FEA变形场进行匹配。结论是,提出的MI的远场建模是准确的,并且计算效率高。所提出的方法可以帮助设计高分辨率和高灵敏度的MI,并解释复杂的MI干涉图模式。

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