Pulsed laser micromachining of Mg-Cu-Gd bulk metallic glass

摘要

Micromachining of Mg-based bulk metallic glasses (BMGs) is performed using two kinds of pulsed nanosecond lasers: a 355 nm ultraviolet (UV) laser and a 1064 nm infrared (IR) laser. Precision machining on the micrometer scale and the preservation of amorphous or short-range order characteristics are important for the application of BMGs in micro-electro-mechanical systems. A higher micromachining rate is achieved using the UV laser than using the IR laser due to a better absorption rate of the former by Mg-based BMGs and a higher photon energy. The cutting depth of Mg-based BMGs ranges from 1 to 80 μm depending on the laser parameters. By appropriate adjustment of the laser power and scan speed, successful machining of the Mg-based BMG with preservation of the amorphous phase is achieved after the laser irradiation process. Short-pulse laser cutting represents a suitable alternative for machining of micro components.