Mach-Zehnder interferometric optical switch with MEMS phase shifter

摘要

We propose a novel Mach-Zehnder interferometric optical switching device with micro-electro-mechanical systems (MEMS) phase shifters. Analytical results show that the stretch length per phase shifter is 70 nm at an applied voltage of 100 V. Phase switching can be achieved by the cascade connections of fifteen phase shifters.