Multiple self-mixing interferometry algorithm based on phase modulation for vibration measurement

摘要

A novel algorithm based on a phase modulation and demodulation technique for multiple self-mixing interferometry was proposed in this paper. This algorithm can measure nanoscale vibration in real time and enhance the measurement resolution of a multiple self-mixing interferometer twofold compared with that of a self-mixing interferometer. In this paper, the principles of the method were described in detail, and a phase equation for multiple self-mixing interferometry was derived. Experiments were confirmed by conducting a series of experiments with different amplitudes, different signal-to-noise ratios, and different vibration waveforms. The experimental results showed that the algorithm can rapidly demodulate vibration in real time and indicated good agreement between theory and experiment.