Production of intense highly charged ion beams by IMP 14.5 GHz electron cyclotron resonance ion source

摘要

A new 14.5 GHz Ehz Electron Cyclotron Resonance (ECR) ion source has been constructed over the last two years. The source was designed and tested y making use of the latest results from ECR ion source development, such as high mirror magnetic field, large plasma volume, and biased probe. 140 μA of O~7+, 185μA of Ar~11+ and 50μA of Xe~26+ could be produced with a RF power of 800 W. The intense Beams of highly charged metallic ions are produced by means of the method of a Metal evaporation oven and volatile compound through axial access.