Secondary ion mass spectrometry using energetic cluster ion beams: Toward highly sensitive imaging mass spectrometry

摘要

Imaging mass spectrometry (IMS), based on linking mass-analysis data for ions and their original positions in a sample, allows the visualization of the spatial distribution of atomic and/or molecular species in the sample, and is therefore an essential analytical method for the characterization of chemical and biological materials. For sensitive elemental and chemical imaging using IMS, a sufficient amount of ions to be analyzed should be supplied from the analyzing area on the sample surface. Secondary ion mass spectrometry (SIMS) using energetic cluster ions (ECIs) with energies of sub-MeV and above as primary ions (ECI-SIMS) can provide the secondary ions necessary for the characterization of organic materials with high emission yields. Hence, ECI-SIMS is a good method for highly sensitive IMS. We report recent progress in ECI beam manipulation techniques for applications of ECI-SIMS to highly sensitive IMS together with the characteristics of ECI impacts on organic materials.