Development of a new generation of 3D pixel sensors for HL-LHC

G.-F. Dalla Betta; M. Boscardin; G. Darbo; R. Mendicino; M. Meschini; A. Messineo; S. Ronchin; D.M.S. Sultan; N. Zorzi

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Development of a new generation of 3D pixel sensors for HL-LHC

机译：开发用于HL-LHC的新一代3D像素传感器

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摘要

This paper covers the main technological and design aspects relevant to the development of a new generation of thin 3D pixel sensors with small pixel size aimed at the High-Luminosity LHC upgrades.

机译：本文涵盖了与针对高亮度LHC升级的新一代小尺寸像素薄型3D像素传感器的开发相关的主要技术和设计方面。

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来源
《Nuclear Instruments & Methods in Physics Research》 |2016年第11期|386-387|共2页
作者
G.-F. Dalla Betta; M. Boscardin; G. Darbo; R. Mendicino; M. Meschini; A. Messineo; S. Ronchin; D.M.S. Sultan; N. Zorzi;
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作者单位

Universita di Trento, Dipartimento di Ingegneria Industriale, I-38123 Trento, Italy,TIFPA INFN, I-38123 Trento, Italy;

Fondazione Bruno Kessler, I-38123 Trento, Italy,TIFPA INFN, I-38123 Trento, Italy;

INFN Sezione di Geneva, I-16146 Genova, Italy;

Universita di Trento, Dipartimento di Ingegneria Industriale, I-38123 Trento, Italy,TIFPA INFN, I-38123 Trento, Italy;

INFN Sezione di Firenze, I-50019 Sesto Fiorentino, Italy;

Universita di Pisa, Dipartimento di Fisica, I-56127 Pisa, Italy,INFN, Sezione di Pisa, I-56127 Pisa, Italy;

Fondazione Bruno Kessler, I-38123 Trento, Italy;

Universita di Trento, Dipartimento di Ingegneria Industriale, I-38123 Trento, Italy,TIFPA INFN, I-38123 Trento, Italy;

Fondazione Bruno Kessler, I-38123 Trento, Italy,TIFPA INFN, I-38123 Trento, Italy;

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原文格式 PDF
正文语种 eng
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关键词
3D silicon sensors; Deep Reactive Ion Etching; Fabrication technology;

机译：3D硅传感器;深度反应离子刻蚀;制作技术;

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2. Development of radiation hard CMOS active pixel sensors for HL-LHC [J] . Heinz Pernegger Nuclear Instruments & Methods in Physics Research. Section A, Accelerators, Spectrometers, Detectors and Associated Equipment . 2016,第jula11期

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3. Development of pixel sensors with 25 × 500 μm~2 pitch for the ATLAS HL-LHC upgrade [J] . S. Burdin, G. Casse, P. Dervan, Nuclear Instruments & Methods in Physics Research. Section A, Accelerators, Spectrometers, Detectors and Associated Equipment . 2014,第nova21期

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机译：地图集升级平面像素传感器R＆D项目的最新成果：全面概述了对未来HL-LHC应用的辐射硬平面像素传感器开发的当前最先进的
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6. Development of Gentle Slope Light Guide Structure in a 3.4 μm Pixel Pitch Global Shutter CMOS Image Sensor with Multiple Accumulation Shutter Technology [O] . Hiroshi Sekine, Masahiro Kobayashi, Yusuke Onuki, 2017

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7. Development of a new generation of 3D pixel sensors for HL-LHC [O] . Betta, G. -F. Dalla, Boscardin, M., Darbo, G., 2016

机译：开发用于HL-LHC的新一代3D像素传感器

Development of a new generation of 3D pixel sensors for HL-LHC

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