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首页> 外文期刊>Nuclear Instruments & Methods in Physics Research. B, Beam Interactions with Materials and Atoms >Low-energy X-ray performance of SOI pixel sensors for astronomy, 'XRPIX'
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Low-energy X-ray performance of SOI pixel sensors for astronomy, 'XRPIX'

机译:用于天文学的SOI像素传感器的低能量X射线性能,'XRPIX'

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摘要

We have been developing a new type of X-ray pixel sensors, "XRPIX", allowing us to perform imaging spectroscopy in the wide energy band of 1-20 keV for the future Japanese X-ray satellite "FORCE". The XRPIX devices are fabricated with complementary metal-oxide-semiconductor silicon-on-insulator technology, and have the "Event-Driven readout mode", in which only a hit event is read out by using hit information from a trigger output function equipped with each pixel. This paper reports on the low-energy X-ray performance of the "XRPK6E" device with a Pinned Depleted Diode (PDD) structure. The PDD structure especially reduces the readout noise, and hence is expected to largely improve the quantum efficiencies for low-energy X-rays. While F-K X-rays at 0.68 keV and Al-K X-rays at 1.5 keV are successfully detected in the "Frame readout mode", in which all pixels are read out serially without using the trigger output function, the device is able to detect Al-K X-rays, but not F-K X-rays in the Event-Driven readout mode. Non-uniformity is observed in the counts maps of Al-K X-rays in the Event-Driven readout mode, which is due to region-to-region variation of the pedestal voltages at the input to the comparator circuit. The lowest available threshold energy is 1.1 keV for a small region in the device where the non-uniformity is minimized. The noise of the charge sensitive amplifier at the sense node and the noise related to the trigger output function are ~ 18 e~- (rms) and ~ 13 e~- (rms), respectively.
机译:我们一直在开发一种新型的X射线像素传感器,“XRPIX”,允许我们在未来日本X射线卫星“力”中为1-20 kev的宽能源带中进行成像光谱。 XRPIX器件由互补金属氧化物半导体硅导体技术制造,并具有“事件驱动读出模式”,其中仅通过使用配备的触发输出功能的命中信息读出了命中事件每个像素。本文报告了具有固定耗尽二极管(PDD)结构的“XRPK6E”装置的低能量X射线性能。 PDD结构特别降低读出噪声,因此预期大大提高了低能量X射线的量子效率。虽然在“帧读出模式”中成功地检测到0.68keV的FK X射线和1.5keV的Al-K X射线,但在没有使用触发输出功能的情况下,所有像素都读出所有像素,则设备可以检测Al-K X射线,但不是事件驱动读出模式下的FK X射线。在事件驱动读出模式中的Al-K X射线的计数映射中观察到不均匀性,这是由于输入到比较器电路的基座电压的区域到区域变化。最低可用阈值能量为1.1 keV,用于在设备中最小化的装置中的小区域。在感测节点处的电荷敏感放大器的噪声和与触发输出功能相关的噪声分别是〜18 e〜 - (rms)和〜13 e〜 - (rms)。

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    Department of Physics Graduate School of Science Kyoto University Kitashirakawa Oiwake-cho Sakyo-ku Kyoto 606-8502 Japan;

    Department of Physics Graduate School of Science Kyoto University Kitashirakawa Oiwake-cho Sakyo-ku Kyoto 606-8502 Japan;

    Department of Physics Graduate School of Science Kyoto University Kitashirakawa Oiwake-cho Sakyo-ku Kyoto 606-8502 Japan;

    Department of Physics Graduate School of Science Kyoto University Kitashirakawa Oiwake-cho Sakyo-ku Kyoto 606-8502 Japan;

    Department of Physics Graduate School of Science Kyoto University Kitashirakawa Oiwake-cho Sakyo-ku Kyoto 606-8502 Japan;

    Department of Physics Graduate School of Science Kyoto University Kitashirakawa Oiwake-cho Sakyo-ku Kyoto 606-8502 Japan;

    Department of Applied Physics Faculty of Engineering University of Miyazaki 1-1 Gakuen Kibana-dai Nishi Miyazaki 889-2192 Japan;

    Department of Applied Physics Faculty of Engineering University of Miyazaki 1-1 Gakuen Kibana-dai Nishi Miyazaki 889-2192 Japan;

    Department of Applied Physics Faculty of Engineering University of Miyazaki 1-1 Gakuen Kibana-dai Nishi Miyazaki 889-2192 Japan;

    Department of Applied Physics Faculty of Engineering University of Miyazaki 1-1 Gakuen Kibana-dai Nishi Miyazaki 889-2192 Japan;

    Department of Applied Physics Faculty of Engineering University of Miyazaki 1-1 Gakuen Kibana-dai Nishi Miyazaki 889-2192 Japan;

    Institute of Particle and Nuclear Studies High Energy Accelerator Research Org. KEK 1-1 Oho Tsukuba 305-0801 Japan;

    Institute of Particle and Nuclear Studies High Energy Accelerator Research Org. KEK 1-1 Oho Tsukuba 305-0801 Japan;

    Department of Physics Faculty of Science and Technology Tokyo University of Science 2641 Yamazaki Noda Chiba 278-8510 Japan;

    Department of Physics Faculty of Science and Technology Tokyo University of Science 2641 Yamazaki Noda Chiba 278-8510 Japan;

    Department of Physics Faculty of Science and Technology Tokyo University of Science 2641 Yamazaki Noda Chiba 278-8510 Japan;

    Department of Physics Faculty of Science and Technology Tokyo University of Science 2641 Yamazaki Noda Chiba 278-8510 Japan;

    Research Institute of Electronics Shizuoka University Johoku 3-5-1 Naka-ku Hamamatsuu Shizuoka 432-8011 Japan;

    Research Institute of Electronics Shizuoka University Johoku 3-5-1 Naka-ku Hamamatsuu Shizuoka 432-8011 Japan;

    National Institute of Technology Okinawa College Henoko 905 Nago-shi Okinawa 905-2192 Japan;

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  • 正文语种 eng
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  • 关键词

    X-ray detectors; X-ray SOIPIX; Monolithic active pixel sensors; Silicon on insulator technology;

    机译:X射线探测器;X射线Soipix;单片有源像素传感器;绝缘体技术的硅;

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