Deposition of ZrC-coated particle for HTR with ZrCl_4 powder

摘要

As the most promising candidate of SiC-coated fuel particles used in HTR fuel element, ZrC-coated particle has excellent irradiation performance. In this paper, ZrC coating is deposited by CVD with ZrCU powder supply method. ZrCl_4 powder supply equipment and the saturation vapor pressure are studied, which show that saturation vapor pressure of ZrCl_4 is enough to satisfy deposition of ZrC coating in fluidized bed. Several deposition parameters such as C/Zr ratio and deposition temperature are investigated theoretically and experimentally, which have influence on ZrC coating key properties, such as mol ratio of Zr/C, and density. The results show that in a given temperature, C/Zr ratio in raw gas has more influence on ZrC structure, and high quality ZrC coating can be deposited by optimal condition with this method.