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Fabrication of photonic crystals for the visible spectrum by holographic lithography

机译:通过全息光刻技术制造可见光谱的光子晶体

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The term 'photonics' describes a technology whereby data transmission and processing occurs largely or entirely by means of photons. Photonic crystals are microstructured materials in which the dielectric constant is periodically modulated on a length scale comparable to the desired wavelength of operation. Multiple interference between waves scattered from each unit cell of the structure may open a 'photonic bandgap'—a range of frequencies, analogous to the electronic bandgap of a semiconductor, within which no propagating electromagnetic modes exist. Numerous device principles that exploit this property have been identified. Considerable progress has now been made in constructing two-dimensional structures using conventional lithography, but the fabrication of three-dimensional photonic crystal structures for the visible spectrum remains a considerable challenge. Here we describe a technique—three-dimensional holographic lithography—that is well suited to the production of three-dimensional structures with sub-micrometre periodicity. With this technique we have made microperiodic polymeric structures, and we have used these as templates to create complementary structures with higher refractive-index contrast.
机译:术语“光子学”描述了一种技术,借助该技术,数据传输和处理主要或完全通过光子进行。光子晶体是微结构材料,其中介电常数在与所需工作波长相当的长度尺度上周期性地调节。从结构的每个单位单元散射的波之间的多重干扰可能会打开“光子带隙”,即类似于半导体的电子带隙的频率范围,在其中不存在传播的电磁模。已经发现了许多利用该特性的设备原理。现在已经在使用常规光刻技术构建二维结构方面取得了相当大的进步,但是制造可见光谱的三维光子晶体结构仍然是一个巨大的挑战。在这里,我们描述了一种非常适合于产生亚微米周期性的三维结构的三维全息光刻技术。通过这种技术,我们制成了微周期聚合物结构,并将它们用作模板来创建具有较高折射率对比的互补结构。

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