机译:硬头软弹簧光刻
Department of Materials Science and Engineering, Northwestern University, 2220 Campus Drive, Evanston, Illinois 60208, USA International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, USA;
International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, USA Department of Chemistry, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, USA,Department of Chemistry, New York University, 100 Washington Square East, New York, New York 10003, USA (A.8.B.);
Laboratory of Advanced Materials & Department of Chemistry, Fudan University, 2205 Song-Hu Road, Shanghai, 200438, China (G.Z.) Department of Materials Science and Engineering, Northwestern University, 2220 Campus Drive, Evanston, Illinois 60208, USA International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, USA;
International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, USA Department of Chemistry, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, USA;
International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, USA Department of Chemistry, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, USA;
International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, USA Department of Chemistry, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, USA Department of Chemistry, New York University, 100 Washington Square East, New York, New York 10003, USA (A.8.B.);
Laboratory of Advanced Materials & Department of Chemistry, Fudan University, 2205 Song-Hu Road, Shanghai, 200438, China (G.Z.) Department of Materials Science and Engineering, Northwestern University, 2220 Campus Drive, Evanston, Illinois 60208, USA International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, USA Department of Chemistry, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, USA;
机译:基于软弹簧壁的非周期边界条件,用于稠密流体的非平衡分子动力学
机译:在近似的Toda振荡器分析中,软弹簧和硬弹簧双稳态之间的翻转运算
机译:在近似的Toda振荡器分析中,软弹簧和硬弹簧双稳态之间的翻转运算
机译:光刻和过程建模概述:第一部分 - 光子过程建模(光学光刻X射线光谱光谱涂料化学气相沉积)(邀请纸)
机译:通过电光刻和电印刷光刻进行纳米级蛋白质图案化。
机译:使用纳米球刻蚀,软刻蚀和等离子刻蚀制造的等离子纳米结构
机译:高分辨率纳米透明机构:近期纯粹和经济高效的自上而下的光刻的最新进展,用于≈10nm尺寸纳米图:从边缘光刻到次级溅射光刻(ADV。Mater。35/2020)
机译:更新sEmaTECH 0.5 Na极紫外光刻(EUVL)微场曝光工具(mET)。会议:spIE - 极紫外(EUV)光刻V,加利福尼亚州圣何塞,2014年2月23日;相关信息:Journal.publication日期:90481m。