Because of wide concentration ranges' and different application environments, including, the presence of other gases, rough industrial conditions, and high temperatures, not all requirements can be fulfilled by commercially available sensors. Therefore, many materials and improved methods for humidity mea- surement have been proposed. Sensors which directly transduce humidity into electrical signals are the most suitable for process monitoring and controlling, and can be manufactured by thick-or thin- film techniques in small sizes, large num- bers, and at low cost.
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