Compact Diode Connected MOSFET Detector for On-Chip Millimeter-Wave Voltage Measurements

摘要

A root-mean-square diode connected MOSFET detector for estimating the signal voltage of internal nodes of millimeter-wave circuits is demonstrated. These detectors fabricated in a foundry 65 nm CMOS process provide an affordable means for RF testing, built-in self-test as well as debugging of mm-wave circuits. This broadband detector operates from 80–110 GHz with detector gain of 8.5 at 60 nA bias. This in combination with high input impedance that results in less than 0.15 dB insertion loss relative to a thru structure, and a small area of 20 makes the detector non-invasive.