Electronically tunable multi-line TRL usingan impedance matched multi-BitMEMS phase shifter

摘要

An electronically tunable thru-reflect-line (TRL) calibration set that utilizes a 4-b true time delay microelectromechanical systems (MEMS) phase shifter topology, based on impedance-matched slow-wave coplanar waveguide (CPW) sections, is presented. The accuracy of the tunable TRL is close to a conventional multi-line TRL calibration and shows a maximum error bound of 0.12 at 40GHz. Experimental data for a 4.6mm-long tunable delay standard shows 317/spl deg//dB phase shift at 50GHz (or 91/spl deg//mm) with S/sub 11/ less than -21dB from 1-50GHz. The MEMS beams on the phase shifter are actuated using high resistance SiCr bias lines with typical actuation voltage around 30-45V.