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Two simple approaches to fabricate Au microlines on the outer surfaces of micropipettes

机译:在微量移液器外表面上制作Au微细线的两种简单方法

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摘要

Various lithographic approaches have been developed to generate patterns on flat and non-flat surfaces. However, it still remains a challenge to produce patterns on irregular surfaces, such as on the curved tip of a glass micropipette. To overcome this challenge, we have developed two new approaches in this work, and explored the possibility of applying them to generate Au microlines on the outer surfaces of glass micropipettes. A glass micropipette includes a straight tube and a curved tip. In either approach, the outer surface of the glass micropipette was first thermally coated with a thin Au film. A photoresist (PR)-coated membrane was then pushed against this glass micropipette when the PR was still wet. During the contact, part of the PR was transferred from the membrane to the micropipette. After the membrane was removed, a continuous PR line was left on the outer surface of the glass micropipette. This line extended from the straight tube to the end of the curved tip. Another PR line was further generated on the other side of this micropipette using the same process. Finally, after the Au film was etched using the two PR lines as the masking patterns, followed by the removal of the PR using acetone, two Au lines were generated on the outer surface of the glass micropipette. The two approaches mainly differed in the ways of pressing the PR-coated membrane against the curved tip of the micropipette. In the first approach, a clip was applied for this purpose, while in the second approach a nitrogen flux was employed to make the membrane have intimate contact with the curved tip. To date, we have successfully fabricated Au lines on glass micropipettes of tip sizes down to 35 and 5 μm, respectively, using the two approaches.
机译:已经开发出各种光刻方法以在平坦和非平坦表面上产生图案。然而,在不规则表面上,例如在玻璃微量移液器的弯曲尖端上产生图案仍然是一个挑战。为了克服这一挑战,我们在这项工作中开发了两种新方法,并探讨了将它们应用到在玻璃微量移液器外表面上产生Au微细线的可能性。玻璃微量移液器包括直管和弯曲尖端。在这两种方法中,首先将玻璃微量移液器的外表面涂上一层Au薄膜。当PR仍湿时,将涂有光致抗蚀剂(PR)的膜推向该玻璃微量移液器。在接触过程中,部分PR从膜转移到微量移液器。除去膜后,连续的PR线留在玻璃微量移液器的外表面。这条线从直管延伸到弯曲尖端的末端。使用相同的方法,在该微量移液器的另一侧进一步生成了另一条PR线。最终,在使用两条PR线作为掩模图案蚀刻Au膜之后,随后使用丙酮去除PR,在玻璃微量移液器的外表面上产生两条Au线。两种方法的主要区别在于将PR涂层膜压在微量移液器弯曲尖端上的方式不同。在第一种方法中,为此目的使用了一个夹子,而在第二种方法中,采用了氮气流使膜与弯曲的尖端紧密接触。迄今为止,我们已经使用两种方法在尖端分别低至35和5μm的玻璃微量移液器上成功制造了Au线。

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