机译:用于大面积平板显示器等离子处理的线性感应天线设计
Department of Materials Science and Engineering, Sungkyunkwan University. Suwon, Gyeunggi-do 440-746, South Korea;
Department of Materials Science and Engineering, Sungkyunkwan University. Suwon, Gyeunggi-do 440-746, South Korea;
Department of Materials Science and Engineering, Sungkyunkwan University. Suwon, Gyeunggi-do 440-746, South Korea;
Department of Materials Science and Engineering, Sungkyunkwan University. Suwon, Gyeunggi-do 440-746, South Korea,SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon, Gyeunggi-do 440-746, South Korea;
Department of Electronic and Electrical Engineering, Pohang University of Science and Technology, Pohang 790-784, South Korea;
Department of Electronic and Electrical Engineering, Pohang University of Science and Technology, Pohang 790-784, South Korea;
机译:平板显示处理中使用具有U型并联的多个线性天线的大面积电感耦合等离子体的特性
机译:用于大面积平板显示器等离子处理的低阻抗内部线性感应天线
机译:内部双梳型天线用于平板显示处理的电感耦合等离子体特性
机译:采用多个低电感内部天线模块的超大面积射频等离子体源,用于平板显示处理
机译:行波驱动的感应耦合大面积等离子体源,用于平板处理。
机译:使用平板显示器的症状性调节性和双眼功能障碍
机译:用于大面积平板显示等离子体处理的低阻抗内部线性电感天线
机译:使用具有固有存储器的平板交流等离子面板显示器的系统中显示数据集成的研究。