A semi-analytical model of an electrostatically actuated damped cantilever microbeam is used to study the response characteristics of small amplitude motion about a statically deflected position. A Euler-beam equation, incorporating the electrostatic force terms and the squeeze-film damping terms, coupled with the linearized compressible Reynolds equation is analyzed under different ambient pressures and DC polarization conditions. The dynamic problem is simulated with the coupled field finite element analysis software ANSYS and results are compared. The applicability of the present model for the range of flow compressibility has been studied through the use of a term called compressibility ratio.View full textDownload full textKeywordsMEMS, resonator, DC polarization, squeeze-film damping, coupled-field FEARelated var addthis_config = { ui_cobrand: "Taylor & Francis Online", services_compact: "citeulike,netvibes,twitter,technorati,delicious,linkedin,facebook,stumbleupon,digg,google,more", pubid: "ra-4dff56cd6bb1830b" }; Add to shortlist Link Permalink http://dx.doi.org/10.1080/15376494.2011.572247
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