CALCULATION OF ENERGY DISSIPATION AND TEMPERATURE RISE OF PIEZOELECTRIC METAL-INSULATOR-METAL STRUCTURES

摘要

Equations are given for calculating the temperature rise of thin-film piezoelectric transducers as a results of dielectric, mechanical, and piezoelectric losses and currents in the presence of electrostatic and harmonic excitation. The results of the article can be used in the design of optoelectronic and acoustic measuring devices.