QUARTZ RESONATORS FOR MONITORING THIN-FILM MASS AND THICKNESS

L. K. Gribova; V. E. Savchenko; A. V. Sorokin

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QUARTZ RESONATORS FOR MONITORING THIN-FILM MASS AND THICKNESS

机译：石英谐振器，用于监测薄膜质量和厚度

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摘要

A detailed analysis is presented for a quartz resonator-film system that substantially improves the accuracy in determining the mass and thickness. A proposed method of measuring the mass and other physical properties of the films is tested by experiment, which does not require preliminary calibration.

机译：提出了对石英谐振器-薄膜系统的详细分析，该系统大大提高了确定质量和厚度的准确性。通过实验测试了一种建议的测量薄膜质量和其他物理性能的方法，该方法不需要初步校准。

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来源
《Measurement techniques》 |2005年第2期|p.146-150|共5页
作者
L. K. Gribova; V. E. Savchenko; A. V. Sorokin;
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作者单位

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种 eng
中图分类计量学;
关键词
quartz resonator; equivalent electrical parameters; control; mass; thickness; rigidity; Langmuir-Blodgett films; nanotechnology;

机译：石英谐振器;等效电参数;控制;质量;厚度;刚度;Langmuir-Blodgett膜;纳米技术;
入库时间 2022-08-17 13:11:23

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专利

1. Simultaneous determination of thin-film inertia and shear stiffness using thickness-twist and face-shear modes of an AT-cut quartz resonator [J] . Jiashi Yangab* Jianke Dua amp, Ji Wanga Philosophical Magazine Letters . 2012,第12期

机译：使用AT切割石英谐振器的厚度扭曲和面剪切模式同时确定薄膜惯性和剪切刚度
2. Simultaneous determination of thin-film inertia and shear stiffness using thickness-twist and face-shear modes of an AT-cut quartz resonator [J] . Jiashi Yang, Jianke Du, Ji Wang Philosophical Magazine Letters . 2012,第10a12期

机译：使用AT切割石英谐振器的厚度扭曲和面剪切模式同时确定薄膜惯性和剪切刚度
3. Real-Time Monitoring of Platelet Activation Using Quartz Thickness-Shear Mode Resonator Sensors [J] . Wu Huiyan, Zhao Guangyi, Zu Hongfei, Biophysical Journal . 2016,第3期

机译：使用石英厚度-剪切模式谐振器传感器实时监测血小板活化
4. Real time thin-film thickness monitoring sensors: a comparative study of dual mode Solidly Mounted Resonators with commercial Quartz Crystal Microbalances [C] . Teona Mirea, Manuel Moreno, Nicolo Chiodarelli, IEEE International Ultrasonics Symposium . 2019

机译：实时薄膜厚度监测传感器：具有商业石英晶体微稳压的双模稳定安装谐振器的比较研究
5. A theoretical interpretation of the antibody-antigen interactions between Salmonella and a thickness shear mode (TSM) quartz resonator. [D] . Bailey, Claude Albert. 2003

机译：沙门氏菌和厚度剪切模式（TSM）石英谐振器之间抗体-抗原相互作用的理论解释。
6. Real-Time Monitoring of Platelet Activation Using Quartz Thickness-Shear Mode Resonator Sensors [O] . Huiyan Wu, Guangyi Zhao, Hongfei Zu, 2016

机译：使用石英厚度-剪切模式谐振器传感器实时监测血小板活化
7. Real time thin-film thickness monitoring sensors: a comparative study of dual mode Solidly Mounted Resonators with commercial Quartz Crystal Microbalances [O] . Teona Mirea, Manuel Moreno, Nicolo Chiodarelli, 2019

机译：实时薄膜厚度监测传感器：具有商业石英晶体微稳压的双模稳定安装谐振器的比较研究
8. Thickness-Shear Mode Shapes and Mass-Frequency Influence Surface of a Circularand Electroded AT-Cut Quartz Resonator [R] . Yong, Y. K., Stewart, J. T., Detaint, J., 1992

机译：厚度 - 剪切模式形状和质量频率影响电路和电子aT切割石英谐振器的表面

QUARTZ RESONATORS FOR MONITORING THIN-FILM MASS AND THICKNESS

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