ANALYSIS OF UNCERTAINTIES CAUSED BY PROCEDURAL AND INSTRUMENTAL INTERFEROMETRY ERRORS IN THE TEXTURE AND SHAPE PARAMETERS OF A SURFACE

摘要

Results of an analysis of the procedural and instrumental errors that unavoidably arise in measurement of the texture and shape parameters of a surface by means of the methods of three-dimensional interferometry with reference wave front and lateral shift interferometry are presented. It is noted that the errors in measurement of the current interference orders are responsible for the greatest contribution to the total procedural error, while the errors associated with measurement of the current coordinates and the shift are negligible. It is shown that the total error of the method of approximate integration is related to the interpolation error and depends on the state of the shape of the surface.