Fabrication and characterization of highly ordered porous alumina templates by a two-step anodization process

摘要

Highly ordered through-hole anodic porous alumina membranes were fabricated by electrochemical oxidation of aluminum in a controlled two-step process. A teflon dispositive was used to ensure single side anodization. Under the most appropriate condition for the fabrication of ideally ordered anodic aluminum oxide (AAO), the voltage used was 15 V during 24 h in a 15 % w/v sulfuric acid solution. SEM, TEM and FESEM characterization shows that the as-fabricated AAO film has a defect-free array of straight parallel channels perpendicular to the surface. The thickness of the porous membrane is 20 microns, approximately. The ordered channels are formed in a honey comb arrange with a pore diameter in the range 20-30 nm, wall thickness of 10-20 nm, interpore distance of ～40 nm, and high aspect ratio of 850. The pore density, quantified by image analysis, is 5.4 × 10~(10) pore/cm~2; perfect ordering was maintained in the full depth of the membrane. Dimensions of this porous structure provide a convenient way to precision engineer the nanoscale morphology.