The influence of working gas on CVD diamond quality

摘要

The effect of the working gas pressure and its composition on diamond quality and particles size was investigated. The diamond layers were grown in Hot Filament Chemical Vapor Deposition (HF CVD) reactor. A methanol-hydrogen gas mixture was used as the precursor gas. The structure of these films was characterized by scanning electron microscopy (SEM) and micro-Raman spectroscopy. Typically, the diamond's crystallite size decreased with increasing pressure and increasing with methanol concentration. Additionally the admixture of non-diamond (sp~2-hybridized carbon) phase also increased with increasing both of deposition pressure and of methanol concentration. It was observed that the deposition pressure has a weaker influence on diamond quality than the methanol concentration.