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Microstructure-property relationship in highly ductile Au-Cu thin films for flexible electronics

机译:柔性电子器件高延展性Au-Cu薄膜的微观结构与性能的关系

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摘要

The new and fast emerging field of flexible electronic devices requires highly ductile materials. Deposition of thin metal films on flexible substrates is a suitable method to create highly ductile interconnects. In this study, thin films consisting of a graded composition of Au-Cu were co-deposited by direct-current magnetron sputtering on polyimide (Kapton~?) substrate for in situ SEM tensile testing, while silicon wafer supported thin film spreads were characterized by nanoindentation, XRD and EDX. Substrate quality turned out to be extremely important for strain delocalization to allow for uniform deformation characterized by high ductility. No cracking was observed up to the maximal strain of 30% for films consisting of pure gold and alloys with a low copper content up to 10at.%, while cracking was more prevalent in films with higher copper contents and with applied heat treatment. In the most ductile thin films shear bands are the precursors of ductile cracks.
机译:柔性电子设备的新兴领域正在迅速发展,需要高延展性的材料。在柔性基板上沉积金属薄膜是创建高延展性互连的合适方法。在这项研究中,通过直流磁控溅射在聚酰亚胺(Kapton?)衬底上共沉积由梯度组成的Au-Cu组成的薄膜,以进行原位SEM拉伸测试,而通过硅片支撑的薄膜展布的特征在于纳米压痕,XRD和EDX。事实证明,基板质量对于应变离域非常重要,以允许以高延展性为特征的均匀变形。对于由纯金和低铜含量高达10at。%的合金组成的薄膜,在最大应变达到30%时未观察到裂纹,而在铜含量较高且经过热处理的薄膜中裂纹更为普遍。在大多数韧性薄膜中,剪切带是韧性裂纹的先兆。

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  • 来源
    《Materials Science and Engineering》 |2010年第30期|p.7731-7740|共10页
  • 作者单位

    Laboratory for Nanometallurgy, Department of Materials, ETH Zurich, Wolfgang-Pauli-Str. 10, CH-8093 Zurich, Switzerland;

    Laboratory for Nanometallurgy, Department of Materials, ETH Zurich, Wolfgang-Pauli-Str. 10, CH-8093 Zurich, Switzerland;

    Laboratory for Nanometallurgy, Department of Materials, ETH Zurich, Wolfgang-Pauli-Str. 10, CH-8093 Zurich, Switzerland,Karlsruhe Institute of Technology, Institut fur Zuverlassigkeit von Bauteilen und Systemen, Kaiserstrasse 12, D-76131 Karlsruhe, Germany;

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  • 原文格式 PDF
  • 正文语种 eng
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  • 关键词

    Shear bands; Thin films; Tensile test; High ductility; Nanocrystalline materials; Gold-copper alloy;

    机译:剪切带;薄膜;拉伸试验;高延展性;纳米晶材料;金铜合金;

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