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Preparation and luminescence properties of patterned SOG/Sr2MgSi2O7:Eu2+, Dy3+ long-persistent luminescence composite thin films by one-step photolithography

机译:一步光刻法制备带图案的SOG / Sr2MgSi2O7:Eu2 +,Dy3 +长持续发光复合薄膜及其发光性能

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摘要

In this paper, patterned photosensitive silicon-organic hybrid glass material/Sr2MgSi2O7:Eu2+, Dy3+ (SOG/SMS) long persistent luminescence composite films with lines (widths 50 mu m and 250 mu m), dots (50 mu m) and holes (50 mu m) patterns on silicon wafer were fabricated by one-step photolithography. SMS particles were first synthesized by sol-gel method and their structure was analyzed by XRD. Patterned SOG/SMS composite films containing 5 wt% of SMS particles were then fabricated by one-step photolithography. SEM, fluorescent microscope and spectrofluorophotometer were used for the characterization of the patterned SOG/SMS composite films. It was found that the obtained patterns are of good shapes and order. The fluorescent emission band of the composite films shows a major peak at 468 nm. Decay curves of the composite films have a similar tendency with that of the pure SMS particles, except for slightly lower intensity for the former. (C) 2016 Elsevier Ltd. All rights reserved.t
机译:本文中的图案化光敏硅有机混合玻璃材料/ Sr2MgSi2O7:Eu2 +,Dy3 +(SOG / SMS)长持续发光复合膜具有线(宽度分别为50μm和250μm),点(50μm)和孔(通过一步光刻在硅晶片上制作出50μm的图形。首先通过溶胶-凝胶法合成SMS颗粒,并通过XRD分析其结构。然后通过一步光刻法制备包含5 wt%SMS颗粒的带图案的SOG / SMS复合膜。 SEM,荧光显微镜和荧光分光光度计用于表征图案化的SOG / SMS复合膜。发现所获得的图案具有良好的形状和顺序。复合膜的荧光发射带在468nm处显示主峰。复合膜的衰减曲线具有与纯SMS颗粒相似的趋势,但前者的强度略低。 (C)2016 Elsevier Ltd.版权所有。t

著录项

  • 来源
    《Materials Research Bulletin》 |2016年第7期|84-89|共6页
  • 作者单位

    Soochow Univ, Coll Chem Chem Engn & Mat Sci, Suzhou 215123, Peoples R China;

    Soochow Univ, Coll Chem Chem Engn & Mat Sci, Suzhou 215123, Peoples R China;

    Soochow Univ, Coll Chem Chem Engn & Mat Sci, Suzhou 215123, Peoples R China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Composites; Thin films; Luminescence; Optical properties; Phosphors;

    机译:复合材料;薄膜;发光;光学性能;荧光粉;

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