Emission spectroscopy of the carbon species ejected by pulsed laser ablation of graphite

摘要

Optical emission spectra produced during the laser ablation of graphite using Q-Nd: YAG laser (λ=1064, 532nm) and XeCl laser (λ=308nm) have been studied in order to characterize the laser ablation process as it relates to the deposition of diamond and DLC thin films. Emission lines observed at a laser wavelength of 1064nm are only due to C2, while at the wavelength of 532nm emission lines due to C and C~+ in addition to C_2 are observed.