CALORIMETRIC STUDY OF THE THERMAL INDUCED TRANSFORMATIONS OF ULTRAFINE SILICON CARBIDE POWDER PRODUCED BY RF GLOW DISCHARGE

摘要

Nanometric powder of silicon carbide has been produced by plasma-enhanced chemical vapor deposition (PECVD) in a radiofrequency discharge of silane and methane gas mixtures. The as deposited powders consists of amorphous particles which are highly hydrogenated. We will show in this communication, that the powder structure can be improved by thermal annealing at high temperatures. The structural changes have been analyzed by several techniques such as thermal desorption of hydrogen (TDSH), differential scaning calorimetry (DSC), infrared spectroscopy (IR) and transmission electron microscopy (TEM). The kinetic parameters of processes such as Si-H and C-H bond breaking have been determined. After annealing, the particles are crystalline, hydrogen free and do not suffer room temperature oxydation.