Fabrication of Si_3N_4 Micro-components by a Combined Microfabrication Process

摘要

Si-based high-temperature ceramics are attractive materials for power microelectromechanical systems (power MEMS), such as microscale gas turbines, micro-combustors and micro-reactors. This presentation introduces a novel process for the microfabrication of Si_3N_4 ceramics, which mainly consists of pre-sintering of Si powder compacts, micromachining of pre-sintered Si preforms and reaction sintering of the micromachined Si preforms. The present process has its high potential for Si_3N_4 3-dimensional microfabrication because it combines the machinablity of pre-sintered Si powder compacts and near-net shaping characteristic of S_3N_4 reaction sintering. Si_3N_4 micro-components such as micro nozzle arrays and micro-rotor were fabricated by using the present process.