Fabrication of Piezoelectric Cantilever Beam Based on Nanostructured PZT Film

摘要

A sol-gel technology to fabricate PZT thick film for cantilever beam was investigated. In this process, PZT nano-powder is dispersed into a PZT sol solution, which is identical with the powder in composition, and then the PZT suspension and clean PZT sol solution were deposited alternately on an Au/Cr/SiO_2/Si substrate using spin-coating route. Above process was repeated in order to deposit the desired thickness. The results showed that the perovskite PZT thick film with thickness of about 4 μm was obtained after annealing at 650℃ for 2 h and it has the saturation polarization of 54 μC/cm~2, the remnant polarization of 30 μC/cm~2 and the coercive field of 50 kV/cm.