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首页> 外文期刊>Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures >Control of surface morphology and electronic properties of III-V semiconductors using molecular modification
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Control of surface morphology and electronic properties of III-V semiconductors using molecular modification

机译:使用分子修饰控制III-V半导体的表面形态和电子性能

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GaAs surface was modified by self-assembled monolayer of organic molecules through wet chemical processes, which include etching and coating. Octadecanethiol (ODT) and benzenethiol (BT) were the choice as modifiers. Etched surface of the GaAs, whose quality greatly affects the morphology and properties of the resulting modified GaAs, was investigated by x-ray photoelectron spectroscopy combined with atomic force microscopy (AFM). Nanometer-scale particlelike structures of Ga2O3 appeared on the surface after etching by etchant with low acid concentration. The particle size was controllable by the acid concentration and etching time. Almost the entire surface of the GaAs substrate was successfully covered with thiol molecules when GaAs etched by the etchant with high acid concentration was used. The conduction of the ODT-coated GaAs measured with conductive prove AFM using Rh coated cantilevers was below the detection limit of the current amplifier. However, current-voltage characteristics of BT-coated GaAs showed electron rectification proving electron transport via the π-orbital. The molecular modification of the semiconductors by wet chemical processes may afford a promising route to control the surface states of organic molecule-semiconductor interface for novel device structures.
机译:通过湿法化学过程(包括蚀刻和涂覆),通过自组装有机分子单层对GaAs表面进行了改性。十八烷硫醇(ODT)和苯硫醇(BT)是改性剂。通过X射线光电子能谱结合原子力显微镜(AFM)研究了其质量极大地影响所得改性GaAs的形态和性能的GaAs蚀刻表面。 Ga 2 O 3的纳米级颗粒状结构在低酸浓度的蚀刻剂蚀刻后出现在表面上。颗粒大小可通过酸浓度和蚀刻时间控制。当使用由高酸浓度的蚀刻剂蚀刻的GaAs时,GaAs衬底的几乎整个表面都成功地被硫醇分子覆盖。使用Rh涂层悬臂的导电证明AFM测量的ODT涂层GaAs的导电率低于电流放大器的检测极限。然而,涂有BT的GaAs的电流-电压特性显示出电子整流,证明了电子通过π轨道传输。通过湿化学工艺对半导体进行分子修饰可以为控制新型器件结构的有机分子-半导体界面的表面状态提供有希望的途径。

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