Chemical detection based on adsorption-induced and photoinduced stresses in microelectromechanical systems devices

摘要

The reent advent o microelectromechanical system (MEMS) devices opened up possibilities for chemical detection. Microcantilevers respond to chemical stimuli by undergoing changes in their bending and resonance frequency when molecules adsorb on their surfaces. In our present studies, we extended this concept and studied changes in both the adsorption-induced stress and photoinduced stress as molecules adsorb on the surface of microcantilevers.